APPARATUS AND METHOD FOR GENERATING A LAYER SYSTEM
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United States of America Patent
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Issued Date -
Mar 27, 2014
app pub date -
Sep 20, 2013
filing date -
Sep 21, 2012
priority date (Note) -
Abandoned
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Abstract
For improving the variability in the coating of substrates a coating apparatus is proposed having a plasma generator for generating a plasma jet which exits from a coating head of the plasma generator. A first particle reservoir and a second particle reservoir are provided. The particles from the first particle reservoir and the second particle reservoir are supplied to the plasma jet as a particle mixture via a transport pipe. A supply control device is provided for setting the amount of particles from the first particle reservoir fed into the transport pipe relative to the amount of particles from the second particle reservoir.
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