Semiconductor processing station and method for processing semiconductor wafer

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United States of America Patent

PATENT NO 9558974
SERIAL NO

13629498

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Abstract

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A semiconductor processing station is provided. The semiconductor processing station includes a first platform, a second platform and a vacuum tunnel, wherein the first platform has a first load lock and a first plurality of chambers, and the second platform has a second load lock and a second plurality of chambers, and the vacuum tunnel connects the first and the second load locks.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN ROAD 6 HSINCHU SCIENCE PARK HSINCHU 300

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Tien-Chen New Taipei, TW 18 157
Kao, Mao-Lin Miaoli County, TW 6 46
Ko, Li-Jen Hsinchu County, TW 8 35
Liu, Hsu-Shui Taoyuan County, TW 92 836
Pai, Jiun-Rong Hsinchu County, TW 139 890
Shen, Hsiang-Yin Hsinchu, TW 11 39

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