METHODS AND A MOLD ASSEMBLY FOR FABRICATING POLYMER STRUCTURES BY IMPRINT TECHNIQUES
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Sep 18, 2013
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Sep 21, 2012
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The present disclosure relates to mold components and imprint lithography techniques applied on the basis of organic mold materials in order to form polymer microstructure elements. It has been recognized that adapting surface characteristics of at least one mold component may significantly enhance performance of the lithography process, in particular with respect to suppressing residual polymer material, which in conventional strategies may have to be removed on the basis of an additional etch process.
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