GAS SUPPLY DEVICE FOR A VACUUM PROCESSING CHAMBER, METHOD OF GAS SUPPLYING AND SWITCHING
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United States of America Patent
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Issued Date -
Mar 27, 2014
app pub date -
Sep 18, 2013
filing date -
Sep 20, 2012
priority date (Note) -
Abandoned
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Abstract
The present disclosure provides a gas supply device used in vacuum processing chambers, which comprises: a first gas source and a second gas source; a first gas switch in which its input is connected to the first gas source and its output can be switchably connected to the gas inlets of two vacuum processing chambers or two processing stations in one vacuum processing chamber; a second gas switch, in which its input is connected to the second gas source and its output can be switchably connected to the gas inlets of the two vacuum processing chambers or the two processing stations; a control device for controlling the switching of the first gas switch and the second gas switch, so as to make the first gas source and the second gas source complementarily switch between two vacuum processing chambers or two processing stations in one vacuum processing chamber. The present disclosure achieves complementary switching of reactant gases in at least two vacuum processing chambers, which achieves full use of reactant gases, saving the cost and improving work efficiency.
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