FRONT OPENING UNIFIED POD HAVING INLET AND OUTLET
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United States of America Patent
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Issued Date -
Mar 20, 2014
app pub date -
Dec 19, 2012
filing date -
Sep 17, 2012
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a front opening unified pod (FOUP) having three inlets and one outlet. Thereby, the mixing region for the moisture, oxygen, and the filled gas can be increased and the removing efficiency of the moisture and oxygen in the FOUP is enhanced, improving the purging efficiency of the FOUP and shortening the time required for filling gas. In addition, the humidity in the FOUP can be reduced effectively so that the internal environment of the FOUP can reach rapidly the condition suitable for semiconductor fabrication. Hence, the subsequent semiconductor processes can be performed and the preparation time for the processes can be shortened.
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