SILICON PURIFICATION METHOD AND SILICON PURIFICATION DEVICE

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United States of America Patent

SERIAL NO

14075322

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Abstract

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The silicon purification method uses a silicon purification device including at least a crucible for loading a silicon metal and a plasma torch, and purifies the silicon metal by injecting a plasma gas from the plasma torch toward a melt surface of the silicon metal loaded in the crucible in a state where an angle formed by the melt surface and the plasma gas is set in the range of 20° to 80°.

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Patent Owner(s)

Patent OwnerAddress
ULVAC INCKANAGAWA JAPAN KANAGAWA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
NAGATA, Hiroshi Sammu-shi, JP 144 984
OOKUBO, Yasuo Sammu-shi, JP 7 4

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