PROCESS FOR PREPARING TRISILYLAMINE IN THE GAS PHASE

United States of America Patent

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Issued Date
Mar 13, 2014
app pub date
Apr 26, 2012
filing date
May 17, 2011

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Abandoned

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Abstract

The invention relates to a method for producing trisilylamine from ammoniac and monochlorosilane in the gas phase. The invention further relates to a plant in which such a method can be performed.

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Patent Owner	Address
EVONIK DEGUSSA GMBH	RELLINGHAUSER STRASSE 1-11 ESSEN 45128

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C01B:NON-METALLIC ELEMENTS; COMPOUNDS THEREOF

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Doering, Jens	Dortmund, DE	6	23
Knippenberg, Udo	Marl, DE	12	227
Lunt-Rieg, Ingrid	Bad Homburg, DE	9	44
Rauleder, Hartwig	Rheinfelden, DE	105	730
Uhlich, Wilfried	Marl, DE	4	24

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PROCESS FOR PREPARING TRISILYLAMINE IN THE GAS PHASE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14117925

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14117925

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