Precursors for Metal Organic Chemical Vapor Deposition Processes and Their Use

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United States of America Patent

APP PUB NO 20140065060A1
SERIAL NO

14013700

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Abstract

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The present invention relates to a compound of the general formula (I)

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Patent Owner(s)

Patent OwnerAddress
KARLSRUHER INSTITUT FUR TECHOLOGIE (KIT)KAISERSTRASSE 12 KARLSRUHE 76131

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bräse, Stefan Troisdorf, DE 4 2
Enders, Mirja Karlsruhe, DE 1 2
Faust, Matthias Karlsruhe, DE 2 2
Gao, Kun Karlsruhe, DE 28 10
Gerlinger, Wolfgang Limburgerhof, DE 19 86
Kasper, Gerhard Karlsruhe, DE 15 225
Müller, Thierry Karlsruhe, DE 2 3
Reichenbach, Linus Aachen, DE 1 2
Sachweh, Bernd Meckenheim, DE 26 181
Seipenbusch, Martin Karlsruhe, DE 1 2

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