MULTI-CHANNEL LUMINOUS ENERGY SENSING UNIT, APPARATUS FOR MEASURING LIGHT ENERGY OF EXPOSURE DEVICE AND METHOD FOR MEASURING LIGHT ENERGY BY CHANNEL
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United States of America Patent
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Issued Date -
Mar 6, 2014
app pub date -
Aug 28, 2013
filing date -
Aug 31, 2012
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a multi-channel luminous energy sensing unit, an apparatus for measuring light energy of an exposure device and a method for measuring light energy by channel. In accordance with one embodiment of the present invention, a multi-channel luminous energy sensing unit to sense an amount of light illuminated from a light source, which includes a board; and a plurality of light sensor modules arranged on the board for sensing at least two channel light with bandwidths different from each other among the light illuminated from the light source, is provided. And also, an apparatus for measuring light energy of an exposure device including the same and a method for measuring light energy by channel are provided.
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