Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures

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United States of America Patent

PATENT NO 9534848
SERIAL NO

13975945

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Abstract

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A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Sunnyvale, US 73 532
Brunner, Rudolf Mountain View, US 44 373
Chimmalgi, Anant San Jose, US 31 217
Derstine, Matthew Los Gatos, US 29 281
Giang, Quang San Francisco, US 2 17
Gross, Ken San Carlos, US 25 126
Kim, Erik Sunnyvale, US 2 13
Lasfargues, Cedric Castro Valley, US 1 2
Patil, Rajeev Fremont, US 12 90
Scott, Dan San Jose, US 4 275
Vora, Younus San Jose, US 5 84
Wang, Jincheng San Jose, US 33 110
Wilson, Lauren San Jose, US 15 138

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