Method for grinding wafers by shaping resilient chuck covering
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United States of America Patent
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Issued Date -
Feb 27, 2014
app pub date -
Aug 27, 2012
filing date -
Aug 27, 2012
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Abandoned
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Abstract
This method facilitates and improves the production of quality thin wafers by adhering traditional resilient back-grind tape that has been perforated over the area that will contact the wafer on the ceramic porous grind chuck, so as to allow vacuum to be applied to the wafer back surface to hold the wafer for processing. The tape adhering to the chuck is ground with a abrasive grind wheel, bringing the surface of the tape parallel to the chuck surface which was previously ground by the same grinding device. Grinding the tape while it is mounted on the chuck establishes the plane perpendicular to the grind wheel spindle, removes the bumpiness from the perforation holes and evens out the non-uniformity of the tape, resulting in improved wafer back side grinding and thus good site flatness.
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