SEMICONDUCTOR DEVICE WITH RESISTANCE CIRCUIT
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United States of America Patent
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app pub date -
Nov 6, 2013
filing date -
Mar 13, 2011
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Abstract
A semiconductor device has a resistance circuit including a resistance element as a first thin film arranged on an isolation oxide film provided on a surface of a semiconductor substrate, a second thin film comprised of silicon nitride formed on the first thin film, an intermediate insulating film formed on the second thin film, a contact hole passing through the second thin film, and a metal wiring formed on the contract hole. The first thin film has a low concentration impurity region and a high concentration impurity region at each of both ends of the low concentration impurity region. The second thin film is formed on the first thin film so as to be disposed on each of the high concentration impurity regions but not on the low concentration impurity region. An insulated gate field effect transistor is provided in a region of the semiconductor substrate surrounded by the isolation oxide film.
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