DUAL SINGLE SIDED SPUTTER CHAMBERS WITH SUSTAINING HEATER

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United States of America Patent

APP PUB NO 20140050843A1
SERIAL NO

13588946

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Abstract

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A disk processing system having a heater chamber and dual single-sided sputter chambers each with a sustaining heater.

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Patent Owner(s)

Patent OwnerAddress
WD MEDIA LLC5601 GREAT OAKS PARKWAY SAN JOSE CA 95119

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LIU, Hongling Sunnyvale, US 7 75
TANAKA, Tatsuru Campbell, US 11 189
YI, Chang B FREMONT, US 2 74
YUAN, Hua Fremont, US 35 712

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