METHOD FOR ETCHING A BST LAYER

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United States of America Patent

SERIAL NO

14056698

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The disclosure concerns a method for etching a PVD deposited barium strontium titanate layer, wherein a non-ionic surfactant at a concentration between 0.1 and 1 percent is added to an acid etching solution.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R LITALY BRIANZA MONZA MONZA AND BRIANZA
STMICROELECTRONICS (TOURS) SAS10 RUE THALES DE MILET TOURS 37100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Caro, Vincent Saint Avertin, FR 5 0
Rodilosso, Davide Catania, IT 1 0

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