APPARATUS FOR INSPECTING A MEASUREMENT OBJECT WITH TRIANGULATION SENSOR

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United States of America Patent

APP PUB NO 20140043610A1
SERIAL NO

13961579

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Abstract

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An apparatus for inspecting a measurement object, comprising a workpiece support for receiving the measurement object and a measuring head carrying an optical sensor. The measuring head and workpiece support are movable relative to one another. The optical sensor has an objective and a camera for capturing an image of the measurement object. The objective has a light entrance opening and a light exit opening, a diaphragm, and a multitude of lens-element groups arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective. At least two lens-element groups are displaceable parallel to the longitudinal axis. An illumination device illuminates the measurement object at a triangulation angle relative to the longitudinal axis, and a sensor device detects radiation from the illumination device that is incident on the sensor device through the objective.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBHGERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

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  • 2013 Application Filing Year
  • G01B Class
  • 1996 Applications Filed
  • 1734 Patents Issued To-Date
  • 86.88 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201320142015201620172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ENGEL, Thomas AALEN, DE 89 868
WESTPHAL, Peter JENA, DE 38 496

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  • 31 Citation Count
  • G01B Class
  • 90 % this patent is cited more than
  • 11 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges6558915474422017634601 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 90100 +050100150200250300350400450500550600650

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