APPARATUS FOR INSPECTING A MEASUREMENT OBJECT WITH TRIANGULATION SENSOR
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United States of America Patent
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Issued Date -
Feb 13, 2014
app pub date -
Aug 7, 2013
filing date -
Aug 7, 2012
priority date (Note) -
Abandoned
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Abstract
An apparatus for inspecting a measurement object, comprising a workpiece support for receiving the measurement object and a measuring head carrying an optical sensor. The measuring head and workpiece support are movable relative to one another. The optical sensor has an objective and a camera for capturing an image of the measurement object. The objective has a light entrance opening and a light exit opening, a diaphragm, and a multitude of lens-element groups arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective. At least two lens-element groups are displaceable parallel to the longitudinal axis. An illumination device illuminates the measurement object at a triangulation angle relative to the longitudinal axis, and a sensor device detects radiation from the illumination device that is incident on the sensor device through the objective.
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