DEFECT INSPECTION APPARATUS
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Feb 13, 2014
app pub date -
Mar 14, 2013
filing date -
Aug 10, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
According to one embodiment, a defect inspection apparatus includes an inspection unit configured to acquire a plurality of inspection images by photographing repetitive patterns of not larger than a resolution limit of an optical system under different optical conditions with respect to a to-be-inspected sample, an edge image extraction unit configured to respectively extract edge images from the plural inspection images, and a defect determination unit configured to determine the presence of a defect of the pattern based on the plural edge images.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully