PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

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Issued Date
Feb 13, 2014
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Aug 6, 2013
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Aug 7, 2012

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Abstract

A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric film represented by a general formula of (Na_xK_yLi_z)NbO₃(0

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Patent Owner	Address
SUMITOMO CHEMICAL COMPANY LIMITED	2-7-1 NIHONBASHI CHUO-KU TOKYO 103-6020

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HORIKIRI, Fumimasa	Nagareyama, JP	64	150
NOMOTO, Akira	Kasumigaura, JP	30	216
SHIBATA, Kenji	Tsukuba, JP	192	1313
SUENAGA, Kazufumi	Tsuchiura, JP	64	335
WATANABE, Kazutoshi	Tsuchiura, JP	116	867

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PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

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United States of America Patent

13960460

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13960460

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