Material Property Measurements Using Multiple Frequency Atomic Fore Microscopy

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United States of America Patent

SERIAL NO

14052750

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Abstract

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Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

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Patent Owner(s)

Patent OwnerAddress
OXFORD INSTRUMENTS AFM INCPLEASANTON CA

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  • 2013 Application Filing Year
  • G01Q Class
  • 89 Applications Filed
  • 80 Patents Issued To-Date
  • 89.89 % Issued To-Date

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Callahan, Roger C Goleta, US 9 53
Proksch, Roger Santa Barbara, US 57 377

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  • 4 Citation Count
  • G01Q Class
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