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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TEIJIN CHEMICALS LTD	CHIYODA-KU TOKYO 100-0013

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

• 2013 Application Filing Year
• G02B Class
• 6559 Applications Filed
• 5896 Patents Issued To-Date
• 89.90 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
KOGA, Takashi	Chiyoda-ku, JP	25	197
# of filed Patents : 25 Total Citations : 197
TOGASHI, Fumihiro	Chiyoda-ku, JP	3	19
# of filed Patents : 3 Total Citations : 19

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Patent Citation Ranking

• 3 Citation Count
• G02B Class

• 6.28 % this patent is cited more than
• 11 Age

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Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Jul 30, 2025

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2008/0163,096

METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS

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Abstract

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Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.

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Description

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