Separating Device and Method for Producing A Crucible For Said Separating Device
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United States of America Patent
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Jan 30, 2014
app pub date -
Jan 31, 2012
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Feb 4, 2011
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The invention refers to a deposition apparatus comprising a crucible (1) and heating means (2) arranged for heating evaporation material (3) inside the crucible (1), whereby the crucible (1) comprises a metallic body (11) and a protection layer (13) comprising titanium oxide (TixOy), which is covering at least a part of the inside surface (12) of the metallic body (11). Furthermore, the invention refers to a method for producing a crucible for such a deposition apparatus.
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