CAPACITIVE SENSOR COMPRISING DIFFERING UNIT CELL STRUCTURES
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United States of America Patent
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Issued Date -
Jan 30, 2014
app pub date -
Jul 25, 2012
filing date -
Jul 25, 2012
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Abstract
A gas and/or humidity sensor system may include two differing capacitive sensor unit cell structures. A first unit cell has a capacitance measurement that is dependent upon capacitance effects that substantially do not extend to the upper reaches of the sensor's gas/humidity sensitive layer and a second unit cell has a capacitance measurement that is dependent upon electric field effects that extend substantially beyond the distance of the electric fields of the first unit cell. The capacitance associated with the electric fields in the upper regions of the gas/humidity sensitive layer may then be obtained to a first order by subtracting the capacitance of the first unit cell from the capacitance of the second unit cell. By subtracting the capacitance, a capacitance associated with the capacitance of the electric fields of the layer (or portion of layer) of interest may be approximated.
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