SHADOW MASK MODULE AND ORGANIC VAPOR DEPOSITION APPARATUS AND THERMAL EVAPORATION APPARATUS USING THE SAME
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United States of America Patent
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Issued Date -
Jan 23, 2014
app pub date -
Jul 17, 2013
filing date -
Jul 17, 2012
priority date (Note) -
Abandoned
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Abstract
The present invention provides a shadow mask module and an organic vapor deposition apparatus and a thermal evaporation apparatus using the same. The shadow mask module is disposed between a gas outlet and a substrate, and includes a pixel mask and a thermal resist mask. The pixel mask is disposed between the gas outlet and the substrate, and includes a plurality of first openings. The thermal resist mask is disposed between the gas outlet and the pixel mask, and includes a plurality of second openings. Each second opening is disposed corresponding to at least one of the first openings.
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