PUMP MODULE AND POSITIVE DISPLACEMENT PUMP

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United States of America Patent

APP PUB NO 20140017097A1
SERIAL NO

13928970

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pump module (4, 5, 6; 4′, 4″) includes a housing (14) that limits at least one channel (17) connecting at least one inlet with at least one outlet, an elastic membrane (18; 21; 22) extending in the housing in a flow direction, and a plurality of actuators located in the housing opposite each other on both sides of the at least one flow channel and forming actuation stages (A1-A6) arranged one after another in the flow direction, with a respective section of the elastic membrane being deflected and abutting a respective circumferential section of the at least one flow channel upon activation of an actuator of a respective actuation stage for forming a delivery chamber.

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Patent Owner(s)

Patent OwnerAddress
PFEIFFER VACUUM GMBH35614 ASSLAR

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Conrad, Armin Herborn, DE 27 228

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