MOLD, FINE PATTERN PRODUCT, AND METHOD OF MANUFACTURING THOSE
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United States of America Patent
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app pub date -
Sep 17, 2013
filing date -
Jun 4, 2007
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Abstract
A mold for imprinting has a mold pattern for transferring a pattern to a processing object. A base layer having a predetermined base pattern is formed by imprinting on a thermoplastic resin, a thermosetting resin, a photo-curable resin, or the like, and a mold layer is formed in such a way that the mode pattern is shapened along a surface of the base pattern by a surface preparation technique, such as CVD, PVD, or plating.
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