PHOTORESIST-FREE METAL DEPOSITION

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United States of America Patent

APP PUB NO 20140014522A1
SERIAL NO

13948551

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Abstract

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Selectively accelerated or selectively inhibited metal deposition is performed to form metal structures of an electronic device. A desired pattern of an accelerator or of an inhibitor is applied to the substrate; for example, by stamping the substrate with a patterned stamp or spraying a solution using an inkjet printer. In other embodiments, a global layer of accelerator or inhibitor is applied to a substrate and selectively modified in a desired pattern. Thereafter, selective metal deposition is performed.

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Patent Owner(s)

Patent OwnerAddress
NOVELLUS SYSTEMS INC4650 CUSHING PARKWAY FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Drewery, John Stephen Santa Clara, US 24 657
Mayer, Steven T Lake Oswego, US 217 7299
Webb, Eric G Tigard, US 18 409

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