Apparatus and Method for Crystal Growth
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United States of America Patent
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Jan 16, 2014
app pub date -
Apr 3, 2012
filing date -
Apr 8, 2011
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Abstract
An apparatus for vapour phase crystal growth comprising an envelope assembly with a one source module defining at least one source volume, a growth module defining at least one growth volume, and a manifold module defining at least one manifold volume. The source module, manifold module and growth module are configured co-operably to define a fluidly continuous envelope volume including a flow restrictor between the source volume and the growth volume. A vacuum vessel containing one or more of the envelope assemblies. An evacuator to evacuate the vacuum vessel. A fluid communication path between the envelope volume and the vacuum vessel associated with each source volume at a location on the source volume side of its associated flow restrictor. A closure mechanism is configured to restrict the fluid communication path between each source volume and the vacuum vessel. A method of employing such an apparatus is also disclosed.
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