Substrate support for substrate backside contamination control
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United States of America Patent
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Nov 8, 2016
Grant Date -
Jan 9, 2014
app pub date -
Jul 3, 2012
filing date -
Jul 3, 2012
priority date (Note) -
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Abstract
Embodiments of substrate supports are provided herein. In some embodiments, a substrate support may include a first aluminum plate for supporting a substrate, the first aluminum plate having a plurality of heating elements embedded therein to provide a plurality of heating zones; a second aluminum plate disposed beneath and supporting the first aluminum plate; a third aluminum plate disposed beneath and supporting the second aluminum plate; a non-metallic ring disposed atop the first aluminum plate; and a plurality of spacers having an upper portion disposed above a surface of the first aluminum plate, wherein the non-metallic ring and the plurality of spacers support the substrate above the first aluminum plate.
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