Method of Forming Electrically Isolated Structures Using Thin Dielectric Coatings

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United States of America Patent

APP PUB NO 20140008235A1
SERIAL NO

13657375

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Abstract

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Electrochemical fabrication processes and apparatus for producing multi-layer structures where each layer includes the deposition of at least two materials and wherein the formation of at least some layers including operations for providing coatings of dielectric material that isolate at least portions of a first conductive material from (1) other portions of the first conductive material, (2) a second conductive material, or (3) another dielectric material, and wherein the thickness of the dielectric coatings are thin compared to the thicknesses of the layers used in forming the structures. In some preferred embodiments, portions of each individual layer are encapsulated by dielectric material while in other embodiments only boundaries between distinct regions of materials are isolated from one another by dielectric barriers.

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Patent Owner(s)

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MICROFABRICA INCVAN NUYS CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cohen, Adam L Valley Village, US 257 5746
Kumar, Ananda H Fremont, US 120 3509
Lockard, Michael S Lake Elizabeth, US 160 3821
Smalley, Dennis R Newhall, US 214 7959

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