EVAPORATION DEVICE FOR A VACCUM DEPOSITION APPARATUS AND VACUUM DEPOSITION APPARATUS COMPRISING SUCH AN EVAPORATION DEVICE
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United States of America Patent
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Issued Date -
Jan 9, 2014
app pub date -
Jul 3, 2013
filing date -
Jul 4, 2012
priority date (Note) -
Abandoned
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Abstract
An evaporation device for a vacuum deposition apparatus includes a crucible to contain a material to be evaporated and a bottom, a body and an opening, and a heating element surrounding at least partially the crucible body, the evaporation device being placed inside a chamber with pressure <10−3 mbar. The device also includes at least one thermal shield between the crucible body and the heating element, the thermal shield including at least one element movable with respect to the crucible and designed so the heat received by the body of the crucible at a considered point of this body conforms, at a given instant of time, to a non-constant function of the distance between the considered point and the bottom of the crucible, this function being adjustable as regards at least one degree of movability of the first element of the thermal shield with respect to the crucible.
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