METHOD OF MANUFACTURING POLISHING PAD MOLD, POLISHING PAD MOLD MANUFACTURED BY THE METHOD, AND POLISHING PAD MANUFACTURED BY THE MOLD
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United States of America Patent
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Issued Date -
Jan 2, 2014
app pub date -
Jun 19, 2013
filing date -
Jun 29, 2012
priority date (Note) -
Abandoned
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Abstract
A method of manufacturing a polishing pad mold for a polishing pad including a micro pattern α having micro protrusions arranged therein includes steps of manufacturing a mother mold where a mother mold including a substrate, on one side of which a micro pattern β having an inverted protrusion-depression shape with respect to the micro pattern α is formed, is manufactured, manufacturing a positive daughter mold where a positive daughter mold having a micro pattern γ formed on a surface is manufactured by the mold, and manufacturing a negative daughter mold where a negative daughter mold having a micro pattern δ formed on a surface is manufactured by the mold, and an assembly step where the mold is configured by arranging and fixing the molds on a basis with the surfaces having the micro pattern δ faced up. Thereby, highly precise and efficient planarization is provided.
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