Electrostatic Clamp Apparatus And Lithographic Apparatus
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United States of America Patent
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Issued Date -
Jan 2, 2014
app pub date -
Jan 18, 2012
filing date -
Mar 11, 2011
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Abstract
Disclosed is an electrostatic clamp apparatus (500) constructed to support a patterning device (505) of a lithographic apparatus, comprising a support structure against which said patterning device is supported, clamping electrodes (525) for providing a clamping force between the support structure and patterning device, and an array of capacitive sensors (660) operable to measure the shape of said patterning device.
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