Apparatus For Measuring Quality Of Gallium Nitride
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United States of America Patent
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Issued Date -
Jan 2, 2014
app pub date -
Jun 26, 2013
filing date -
Jun 27, 2012
priority date (Note) -
Abandoned
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Abstract
An apparatus for easily measuring the quality of gallium nitride (GaN) in normal conditions such as an atmospheric pressure and room temperature. The apparatus includes a light source disposed above a GaN substrate and a measuring unit disposed above the GaN substrate. The light source emits light to a surface of the GaN substrate. The measuring unit measures the quality of the GaN substrate based on the spectrum of light radiated from the GaN substrate.
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