Enclosure and method for handling electron gun or ion gun
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United States of America Patent
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Nov 15, 2016
Grant Date -
Jan 2, 2014
app pub date -
Feb 21, 2012
filing date -
Mar 18, 2011
priority date (Note) -
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Abstract
The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.
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