PROCESS LIQUID FLOWMETER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20130345996A1
SERIAL NO

14003774

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A flowmeter of the present invention is adapted to measure a flow velocity of a process liquid flowing through a supply pipe, and includes: a pair of ultrasonic oscillators located with a spacing therebetween of a predetermined distance along a flow direction of the supply pipe; a flow velocity calculating part calculating a flow velocity of the process liquid based on a first arrival time elapsed for an ultrasonic wave generated from one of the pair of ultrasonic oscillators to arrive at the other of the pair of ultrasonic oscillators and a second arrival time elapsed for an ultrasonic wave generated from the other of the pair of ultrasonic oscillators to arrive at the one of the pair of ultrasonic oscillators; and a bubble inclusion determining part determining, based on a time-varying amount of the calculated process liquid flow velocity, whether air bubbles are included in the process liquid.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325
HORIBA ADVANCED TECHNO CO LTDKYOTO 601-8551

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando, Ryoji Koshi-shi, JP 31 50
Satoh, Takami Koshi-shi, JP 21 284
Uchimura, Koji Kyoto-shi, JP 10 58

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