SPARK DETECTION IN COATING INSTALLATIONS
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United States of America Patent
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Issued Date -
Dec 26, 2013
app pub date -
Dec 17, 2011
filing date -
Jan 5, 2011
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a method for effective spark detection during a process for treating workpieces with a vacuum treatment installation, For this purpose, in the case of a bias voltage applied to the workpieces, the discrepancy between the current flowing through the workpieces and a mean value is measured and, in the event of a threshold value being exceeded by this discrepancy, the process is stopped. According to the invention, the threshold value is made dependent on the magnitude of the bias voltage.
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