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Abstract

A high voltage varactor that provides a large tuning ratio and a high DC biasing capability includes a non-coplanar interdigitated structure having a stacked structure with a plurality of substantially parallel coplanar first electrode fingers and a plurality of substantially parallel coplanar second electrode fingers. The plurality of substantially parallel coplanar second electrode fingers are interdigitated with the plurality of substantially parallel coplanar first electrode fingers and are not coplanar with the plurality of substantially parallel coplanar first electrode fingers. A voltage tunable dielectric layer may be interposed between the plurality of substantially parallel coplanar first electrode fingers and the plurality of substantially parallel coplanar second electrode fingers. The voltage tunable dielectric layer may be a BST layer, or any other voltage tunable dielectric layer.

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First Claim