SHAPE MEASUREMENT DEVICE AND SHAPE MEASUREMENT METHOD
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United States of America Patent
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Issued Date -
Dec 26, 2013
app pub date -
Aug 30, 2011
filing date -
Aug 31, 2010
priority date (Note) -
Abandoned
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Abstract
The shape measurement device 1 comprises a light source 11, a measuring beam illumination system 13, a reference comb light separator 14, an optical multiplexer 15 and photodetector 16. The reference comb light separator 14 enters with a broadband light, and it separates in a reference comb light with broadband light. The frequency interval of the reference comb light changes continually depending on a size of Y-coordinate level in the image formation point, when the emission direction is assumed Z-axis direction. X-axis means a virtual cutout line for the measuring object, and Y-coordinate means depth for measuring. The interference image emerging in the detective surface is a tomogram for the measurement substantially. Using the reference comb light, the two-dimensional dislocation of depth direction is measured, wherein the dynamic range is extremely wide. When an emission direction is assumed Z-axis direction, a frequency interval of a reference comb light changes depending on size of Y-coordinate level in image formation point continually.
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