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United States of America Patent
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N/A
Issued Date -
Dec 26, 2013
app pub date -
Jun 10, 2013
filing date -
Jun 21, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
This disclosure relates to a flexible triplate stripline that can operate in temperatures of 150 C-250 C, flexible to move up/down with the top of a plasma reactor, and prevent plasma generation near the power transmission line in the stripline. The transmission line may be exposed to ambient conditions. The risk of generating plasma near the transmission line may be minimized by optimizing the height and width of the air gap adjacent to the transmission line and decreasing the voltage in a portion of the stripline by widening the transmission line.
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