SYSTEM FOR SUBSTRATE HANDLING AND PROCESSING
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United States of America Patent
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N/A
Issued Date -
Dec 26, 2013
app pub date -
Jun 20, 2013
filing date -
Jun 21, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
This disclosure relates to a substrate processing system for substrates with a surface area of greater than 1 m2. The system may include, but is not limited to, load locks and processing chambers that are aligned in a vertical manner. For example, the load locks may be arranged above or below the processing chambers. In turn, the processing chambers may be stacked upon each other in a vertical arrangement. A transfer chamber may also be used to transfer substrates between the load locks and the process chambers. The substrate transfer process may be done under vacuum conditions.
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