SILICA GLASS CRUCIBLE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
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United States of America Patent
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Dec 26, 2013
app pub date -
Feb 15, 2012
filing date -
Apr 11, 2011
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Abstract
A method for manufacturing a silica glass crucible, includes: preparing a crucible base material that is made of silica glass and has a crucible shape; fabricating a synthetic silica glass material based on a direct method or a soot method; processing the synthetic silica glass material into the crucible shape without being pulverized; and bonding an inner wall of the crucible base material and an outer wall of the synthetic silica glass material processed into the crucible shape through a silica powder by performing a heat treatment. As a result, it is possible to provide the silica glass crucible that can avoid occurrence of dislocations of silicon single crystal at the time of manufacturing the silicon single crystal, has high heat-resisting properties, and can suppress a reduction in productivity and yield ratio, the manufacturing method thereof, and the method for manufacturing silicon single crystal using such a silica glass crucible.
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