DARK FIELD ILLUMINATION METHOD AND A DARK FIELD ILLUMINATOR
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United States of America Patent
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app pub date -
May 26, 2013
filing date -
Nov 17, 2009
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Abandoned
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Abstract
A dark field illuminator that includes a light source adapted to provide a ring of light characterized by uniform intensity distribution; a collimating ring adapted to receive the ring of light and to direct collimated light beams towards an area of an inspected object such that different points within the area are illuminated by light beams that form substantially identical cones of light; and wherein the collimating ring and the light source are co-centric to an optical axis of the dark field illuminator.
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