PIEZO ACTUATOR WITH PROTECTION AGAINST ENVIRONMENTAL INFLUENCES
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United States of America Patent
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Issued Date -
Dec 12, 2013
app pub date -
Nov 30, 2011
filing date -
Dec 15, 2010
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Abandoned
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Abstract
A piezo actuator with protection against environmental influences comprises a layer stack (1) of piezoelectric material layers (10) and interposed electrode layers (20). The piezo actuator furthermore comprises a first and a second material layer (31, 32) composed in each case of a material which exhibits smaller amount of expansion. than the piezoelectric material layers (10) when a voltage is applied. to the electrode layers (20), and comprises a cover layer (50) composed of a metal material. The layer stack (1) is arranged between the first and second material layers (31, 32). The cover layer (50) surrounds the layer stack (1) and is sputtered onto the first and second material lavers (31, 32).
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