CONTAMINATION REDUCTION ELECTRODE FOR PARTICLE DETECTOR
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United States of America Patent
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Issued Date -
Dec 5, 2013
app pub date -
Jul 6, 2012
filing date -
Jul 5, 2012
priority date (Note) -
Abandoned
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Abstract
A charged particle detector arrangement is described. The detector arrangement includes a detection element and a collector electrode configured to collect charged particles released from the detection element upon impact of signal charged particles.
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