RF-POWERED, TEMPERATURE-CONTROLLED GAS DIFFUSER
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United States of America Patent
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Issued Date -
Nov 28, 2013
app pub date -
May 23, 2013
filing date -
May 25, 2012
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Abstract
A gas diffusing device includes a first portion defining a gas supply conduit having a first inlet and a first outlet and including a second inlet, a second outlet and passages connecting the second inlet to the second outlet. The passages receive non-conductive fluid to cool the first portion. A second portion is connected to the first portion, includes a diffuser face with spaced holes and defines a cavity that is in fluid communication with the first outlet of the gas supply conduit and the diffuser face. A heater is in contact with the second portion to heat the second portion.
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