High-Vacuum Seal

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United States of America Patent

SERIAL NO

13893002

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Abstract

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The invention relates to an improved O-ring seal for use as a high vacuum seal. A limitation of standard O-rig seals is the permeation of water through the O-ring. Especially for instruments in which parts are kept at a cryogenic temperature, such as a cryogenic electron microscope, the presence of water in the vacuum is a problem, as this results in ice growth on the cryogenic parts. As a solution often a double O-ring seal is used, or a metal seal. Both of these solutions have severe draw-backs.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANYHILLSBORO OR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Groot Rients Jan Heeze, NL 4 7
Jonkers, Roland Wilhelmus Pieter Someren, NL 2 6
Uland, Pieter Hendrik Trudo Johannes Eindhoven, NL 2 6
van, den Boom Henricus Fransiscus Maria Nuenen, NL 2 5
van, den Boom Stephanus Hubertus Leonardus Geldrop, NL 3 8

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