ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS
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United States of America Patent
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Issued Date -
Nov 28, 2013
app pub date -
May 13, 2013
filing date -
May 24, 2012
priority date (Note) -
Abandoned
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Abstract
An ultrasonic cleaning method for cleaning an object in a liquid in which a gas is dissolved includes preparing the liquid in which the gas is dissolved and cleaning the object while irradiating the liquid with ultrasonic waves so that a region, where a spatial rate of change of a refractive index of the liquid in which the gas is dissolved is large relative to a case where ultrasonic waves are not applied, appears along a direction in which the ultrasonic waves travel.
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