ULTRASONIC CLEANING METHOD AND ULTRASONIC CLEANING APPARATUS

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United States of America Patent

APP PUB NO 20130312788A1
SERIAL NO

13892327

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An ultrasonic cleaning method for cleaning an object in a liquid in which a first gas is dissolved includes preparing the liquid in which the first gas is dissolved and introducing a second gas into the liquid while irradiating the liquid with ultrasonic waves so as to realize a state where bubbles containing the first gas dissolved in the liquid continue to be generated. The object is cleaned in the state where the bubbles containing the first gas continue to be generated.

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Patent Owner(s)

Patent OwnerAddress
SILTRONIC AGEINSTEINSTR 172 TOWER B / BLUE TOWER 81677 MÜNCHEN 81677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haibara, Teruo Hikari, JP 50 136
Kubo, Etsuko Yokkaichi, JP 11 23
Mori, Yoshihiro Shunan, JP 193 5414
Uchibe, Masashi Izumo, JP 11 23

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