SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Nov 28, 2013
app pub date -
May 13, 2013
filing date -
May 24, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A platform section has an upper platform chamber and a lower platform chamber. Platform units are provided in the upper platform chamber and the lower platform chamber, respectively. A plurality of local arms corresponding to coating processing chambers are provided in the upper platform chamber and the lower platform chamber, respectively. Further, in the upper platform chamber and the lower platform chamber, a plurality of local arms respectively corresponding to a plurality of thermal processing units, a plurality of local arms respectively corresponding to a plurality of adhesion reinforcement processing units and a plurality of local arms respectively corresponding to a plurality of cooling units are provided.
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