MANUFACTURING METHOD OF SINGLE CRYSTAL SUBSTRATE AND MANUFACTURING METHOD OF INTERNAL MODIFIED LAYER-FORMING SINGLE CRYSTAL MEMBER
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Feb 10, 2011
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Feb 10, 2011
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Abstract
It is an object of the present invention to provide a manufacturing method of a single crystal substrate and to provide an internal modified layer-forming single crystal member, each of which is capable of easily manufacturing a relatively large and thin single crystal substrate. The manufacturing method of a single crystal substrate includes: the step of arranging a condensing lens (15), which emits laser beams (B) and corrects aberration caused by a refractive index of a single crystal member (10), contactlessly on the single crystal member (10); the step of irradiating the laser beams onto a surface (10t) of the single crystal member (10), and condensing the laser beams into an inside of the single crystal member; the step of moving the condensing lens (15) and the single crystal member (10) relatively to each other, and forming a two-dimensional modified layer (12) in the inside of the single crystal member (10); and the step of exfoliating a single crystal layer, which is formed by being divided by the modified layer (12), from the modified layer (12), thereby forming a single crystal substrate.
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